Achieving precision in high density batch mode micro-electro-discharge machining
نویسندگان
چکیده
منابع مشابه
Achieving precision in high density batch mode micro-electro-discharge machining
This paper reports a parametric study of batch mode micro-electro-discharge machining (μEDM) of high density features in stainless steel. Lithographically fabricated copper tools with single cross, parallel line and 8 × 8 circle/square array features of 5–100 μm width and 5–75 μm spacing were used to quantify trends in machining tolerance and the impact of debris accumulation. As the tool featu...
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Metal alloys have material properties that are very appealing for micro electro mechanical systems (MEMS), but present a challenge for process integration within a lithographic manufacturing sequence of the type used in the semiconductor industry. The batch-mode micro electrodischarge machining (μEDM) discussed here uses lithographically-fabricated electrode arrays with high density and high un...
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This paper reports recent advances in batch mode micro-electro-discharge machining (μEDM) for high precision micromachining of metal alloys such as stainless steel. High-aspect-ratio silicon microstructures with fine feature sizes formed by deep reactive ion etching are used as cutting tools. To machine workpiece features with widths 10 μm, a silicon dioxide coating is necessary to passivate th...
متن کاملWireless Sensing of Discharge Characteristics for Quality Control in Batch Mode Micro-electro-discharge Machining
Wireless signals are inherently generated during the spark discharges of micro-electro-discharge machining (μEDM). This work harnesses signals between 300-750 MHz for the monitoring of batch mode machining quality. In particular, the wireless spectra are used to sense incipient, debris-dominated machining that can be destructive to both the tool and the workpiece. Planar stainless steel (316L) ...
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Advances in micromachining techniques have led to the evolution of micro-electromechanical systems (MEMS). These techniques are typically based on semiconductor manufacturing processes, which offer various advantages such as batch manufacturing of miniaturized devices and monolithic integration of microelectronics with the devices. Surface micromachining has been used to construct complex micro...
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ژورنال
عنوان ژورنال: Journal of Micromechanics and Microengineering
سال: 2007
ISSN: 0960-1317,1361-6439
DOI: 10.1088/0960-1317/18/1/015002